Approved Work Item
ISO/AWI 23131-1
Ellipsometry — Part 1: Principles
Reference number
ISO/AWI 23131-1
Edition 1
© ISO 2026
Approved Work Item
Under development
A working group has prepared a draft.
Will replace ISO 23131:2021

Abstract

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.

It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

General information

  • Status
     : Under development
    Stage
    : New project registered in TC/SC work programme [20.00]
  • Edition
     : 1
  • Technical Committee :
    ISO/TC 107
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

7
Affordable and Clean Energy
9
Industry, Innovation and Infrastructure
12
Responsible Consumption and Production

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