ISO/TS 22933:2022
p
ISO/TS 22933:2022
74193

Abstract  Preview

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.


General information 

  •  :  Published
     : 2022-04
  •  : 1
     : 15
  •  : ISO/TC 201/SC 6 Secondary ion mass spectrometry
  •  :
    71.040.40 Chemical analysis

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