ISO/FDIS 14606
ISO/FDIS 14606


ISO 14606:2015 gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.

ISO 14606:2015 is not intended to cover the use of special multilayered systems such as delta doped layers.

General information 

  •  :  Under development
  •  : 3
     : 17
  •  : ISO/TC 201/SC 4 Depth profiling
  •  :
    71.040.40 Chemical analysis

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