Abstract Preview

ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.

ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.


General information

  • Status :  Published
    Publication date : 2014-04
  • Edition : 2
    Number of pages : 20
  • :
    ISO/TC 202/SC 1
    Terminology
  • 37.020
    Optical equipment
    01.040.37
    Image technology (Vocabularies)

Buy this standard

Format Language
PDF + ePub
Paper
  • CHF118

Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

Keep up to date with ISO

Sign up to our newsletter for the latest news, views and product information