This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are
— the straight edge method;
— the narrow line method;
— the grating method.
This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.
Status: PublishedPublication date: 2019-01
Edition: 2Number of pages: 53
Technical Committee: ISO/TC 201/SC 2 General procedures
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