This standard has been revised by ISO 18516:2019
Abstract
ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.
Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.
General information
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Status : WithdrawnPublication date : 2006-11
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Edition : 1Number of pages : 24
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- ICS :
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Chemical analysis
Life cycle
A standard is reviewed every 5 years
Revisions / Corrigenda
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Now withdrawn
ISO 18516:2006 -
Revised by
ISO 18516:2019
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