Abstract Preview

ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

General information

  • Status :  Published
    Publication date : 2003-04
  • Edition : 1
    Number of pages : 4
  • :
    ISO/TC 201/SC 6
    Secondary ion mass spectrometry
  • 71.040.40
    Chemical analysis

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Format Language
  • CHF38

Life cycle

A standard is reviewed every 5 years

Revisions / Corrigenda

  • Now under review
    ISO 18114:2003
  • Will be replaced by
    ISO/DIS 18114

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