Standardization in the field of microbeam analysis (measurement, parameters, methods and reference materials) which uses electrons as an incident beam and electrons and photons as the detection signal.
The purpose is to analyze the compositional and structural characteristics of solid materials. The volume of analysis will generally involve a depth up to 10 micrometers and a surface area less than 100 square micrometers.
* number includes updates
|ISO/TC 202/SC 1||Terminology||Sub committee|
|ISO/TC 202/SC 2||Electron probe microanalysis||Sub committee|
|ISO/TC 202/SC 3||Analytical electron microscopy||Sub committee|
|ISO/TC 202/SC 4||Scanning electron microscopy (SEM)||Sub committee|
|ISO/TC 202/WG 1||General procedures and data management||Working group|
|ISO/TC 202/WG 7||Microbeam analysis - Electron Backscatter Diffraction - Measurement of average grain size||Working group|
|EMAS||European Microbeam Analysis Society||A|