Abstract
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
General information
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Status: PublishedPublication date: 2019-03Stage: International Standard to be revised [90.92]
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Edition: 1Number of pages: 21
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Technical Committee :ISO/TC 213ICS :17.040.20
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Draft
International StandardISO/DIS 25178-607
Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Design and characteristics of non-contact (confocal microscopy) instruments
Reference number
ISO/DIS 25178-607
ISO/DIS 25178-607
Edition 1
© ISO 2026
Draft International Standard
ISO/DIS 25178-607
Geometrical product specifications (GPS) — Surface texture: Areal
Part 607: Design and characteristics of non-contact (confocal microscopy) instruments
ISO/DIS 25178-607
ISO/DIS 25178-607
85744
CHF
67
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Under developmentISO/DIS 25178-607