This standard was last reviewed and confirmed in 2017. Therefore this version remains current.
Abstract Preview
The measurements deal with diffusion pumps, ejector pumps, and booster pumps, i.e. pumps capable of operation in both the molecular and laminar flow regions.
General information
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Status : PublishedPublication date : 1993-12
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Edition : 2Number of pages : 3
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- ICS :
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Vacuum technology
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