ISO 11952:2014
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ISO 11952:2014
51061

Abstract 

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.


General information 

  •  :  Withdrawn
     : 2014-05
  •  : 1
     : 58
  •  : ISO/TC 201/SC 9 Scanning probe microscopy
  •  :
    71.040.40 Chemical analysis

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