Abstract

ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.


General information 

  • Status
     : Withdrawn
    Publication date
     : 2007-07
  • Edition
     : 1
    Number of pages
     : 34
  • Technical Committee
     : ISO/TC 209 Cleanrooms and associated controlled environments
  • ICS
     :
    13.040.35 Cleanrooms and associated controlled environments

Life cycle

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