Abstract 

ISO 14594:2003 gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth and analysis volume.

ISO 14594:2003 is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained may only be indicative for other experimental conditions.


General information

  • Status :  Withdrawn
    Publication date : 2003-08
  • Edition : 1
    Number of pages : 17
  • :
    ISO/TC 202/SC 2
    Electron probe microanalysis
  • 71.040.50
    Physicochemical methods of analysis

Life cycle

A standard is reviewed every 5 years



Revisions / Corrigenda

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