This standard was last reviewed and confirmed in 2016. Therefore this version remains current.
Abstract Preview
Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
General information
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Status : PublishedPublication date : 1979-09
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Edition : 1Number of pages : 10
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- ICS :
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Vacuum technology
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