This document describes a procedure for the quantitative characterization of the probe tip of an atomic force microscope (AFM) probe and a restoration of AFM topography images dilated by finite probe size. The three-dimensional shape of the probe apex is extracted by image reconstruction using suitable reference materials. This document is applicable to the reconstruction of AFM topography images of solid material surfaces.
Status: PublishedPublication date: 2022-07
Edition: 1Number of pages: 15
Technical Committee: ISO/TC 201/SC 9 Scanning probe microscopy
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