Abstract
PreviewThis document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
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Status: PublishedPublication date: 2022-07
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Edition: 1Number of pages: 15
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- ICS :
- 71.040.50 Physicochemical methods of analysis
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| Format | Language | |
|---|---|---|
| std 1 92 | PDF + ePub | |
| std 2 92 | Paper |
- CHF92
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