Abstract Preview

This document defines the most important quantities that characterize an energy-dispersive X‑ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this document.


General information

  • Status :  Published
    Publication date : 2021-02
  • Edition : 3
    Number of pages : 13
  • :
    ISO/TC 202
    Microbeam analysis
  • 71.040.99
    Other standards related to analytical chemistry

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