Abstract Preview

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.


General information

  • Status :  Published
    Publication date : 2021-03
  • Edition : 1
    Number of pages : 16
  • :
    ISO/TC 229
    Nanotechnologies
  • 07.120
    Nanotechnologies

Buy this standard

Format Language
PDF
Paper
  • CHF40

Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

Keep up to date with ISO

Sign up to our newsletter for the latest news, views and product information.