Abstract Preview

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.

It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.

It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.


General information

  • Status :  Published
    Publication date : 2021-05
  • Edition : 1
    Number of pages : 7
  • :
    ISO/TC 107
    Metallic and other inorganic coatings
  • 25.220.99
    Other treatments and coatings

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