Abstract Preview

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.


General information

  • Status :  Published
    Publication date : 2020-08
  • Edition : 1
    Number of pages : 29
  • :
    ISO/TC 206
    Fine ceramics
  • 81.060.30
    Advanced ceramics

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