Abstract Preview
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
General information
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Status : PublishedPublication date : 2019-03
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Edition : 1Number of pages : 21
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Technical Committee:Dimensional and geometrical product specifications and verification
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- ICS :
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Properties of surfaces
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