ISO 25178-607:2019 Preview
Geometrical product specifications (GPS) -- Surface texture: Areal -- Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
Buy this standard
|PDF + ePub|
A standard is reviewed every 5 years
Revisions / Corrigenda