Abstract Preview

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

General information

  • Status :  Published
    Publication date : 2019-01
  • Edition : 1
    Number of pages : 16
  • :
    ISO/TC 112
    Vacuum technology
  • 23.160
    Vacuum technology

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