ISO 19668:2017 specifies a procedure by which elemental detection limits in X-ray photoelectron spectroscopy (XPS) can be estimated from data for a particular sample in common analytical situations and reported. This document is applicable to homogeneous materials and is not applicable if the depth distribution of elements is inhomogeneous within the information depth of the technique.
Status : PublishedPublication date : 2017-08
Edition : 1Number of pages : 24
Technical Committee:Electron spectroscopies
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