Abstract Preview

ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.


General information

  • Status :  Published
    Publication date : 2017-02
  • Edition : 1
    Number of pages : 24
  • :
    ISO/TC 206
    Fine ceramics
  • 81.060.30
    Advanced ceramics

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