Abstract Preview

This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are

— the straight edge method;

— the narrow line method;

— the grating method.

This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.


General information

  • Status :  Published
    Publication date : 2019-01
  • Edition : 2
    Number of pages : 53
  • :
    ISO/TC 201/SC 2
    General procedures
  • 71.040.40
    Chemical analysis

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