ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
Status: PublishedPublication date: 2013-10
Edition: 1Number of pages: 46
Technical Committee: ISO/TC 201/SC 7 Electron spectroscopies
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