ISO 13424:2013
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ISO 13424:2013
53773

Abstract  Preview

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.


General information 

  •  :  Published
     : 2013-10
  •  : 1
     : 46
  •  : ISO/TC 201/SC 7 Electron spectroscopies
  •  :
    71.040.40 Chemical analysis

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