ISO 25178-604:2013 Preview
Geometrical product specifications (GPS) -- Surface texture: Areal -- Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
This standard was last reviewed and confirmed in 2018. Therefore this version remains current.
ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
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