Abstract 

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.


General information

  • Status :  Withdrawn
    Publication date : 2014-05
  • Edition : 1
    Number of pages : 58
  • :
    ISO/TC 201/SC 9
    Scanning probe microscopy
  • 71.040.40
    Chemical analysis

Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

Keep up to date with ISO

Sign up to our newsletter for the latest news, views and product information