This standard was last reviewed and confirmed in 2017. Therefore this version remains current.
This International Standard provides procedures for electron microprobe elemental-mapping analysis using
wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally
across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is
assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method,
the calibration method, the correlation method and the matrix correction method.
Status : PublishedPublication date : 2012-03
Edition : 1Number of pages : 10
Technical Committee:Electron probe microanalysis
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