ISO 29301:2010

Microbeam analysis -- Analytical transmission electron microscopy -- Methods for calibrating image magnification by using reference materials having periodic structures

ISO 29301:2010 specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. ISO 29301:2010 is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. ISO 29301:2010 also refers to the calibration of a scale bar. ISO 29301:2010 does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM)


General information

  • Status :  Withdrawn
    Publication date : 2010-06
  • Edition : 1
  • :
    ISO/TC 202/SC 3
    Analytical electron microscopy
  • 37.020
    Optical equipment

Life cycle

A standard is reviewed every 5 years



Revisions / Corrigenda

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