This standard was last reviewed and confirmed in 2018. Therefore this version remains current.
ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.
Status : PublishedPublication date : 2011-08
Edition : 1Number of pages : 18
Technical Committee:Scanning probe microscopy