ISO 22309:2006

Microbeam analysis -- Quantitative analysis using energy-dispersive spectrometry (EDS)

ISO 22309:2006 gives guidance on the quantitative analysis at specific points or areas of a specimen using energy-dispersive spectrometry (EDS) fitted to a scanning electron microscope (SEM) or electron probe microanalyser (EPMA); any expression of amount, i.e. in terms of percent (mass fraction), as large/small or major/minor amounts is deemed to be quantitative. The correct identification of all elements present in the specimen is a necessary part of quantitative analysis and is therefore considered in ISO 22309:2006. ISO 22309:2006 provides guidance on the various approaches and is applicable to routine quantitative analysis of mass fractions down to 1 %, utilising either reference materials or standardless procedures. It can be used with confidence for elements with atomic number Z greater than 10.

Guidance on the analysis of light elements with Z less than 11 is also given.


General information

  • Status :  Withdrawn
    Publication date : 2006-04
  • Edition : 1
  • :
    ISO/TC 202
    Microbeam analysis
  • 71.040.99
    Other standards related to analytical chemistry

Life cycle

A standard is reviewed every 5 years



Revisions / Corrigenda

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