ISO 20341:2003
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ISO 20341:2003
34162

Abstract  Preview

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.


General information 

  •  :  Published
     : 2003-07
  •  : 1
     : 5
  •  : ISO/TC 201/SC 6 Secondary ion mass spectrometry
  •  :
    71.040.40 Chemical analysis

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