This standard was last reviewed and confirmed in 2019. Therefore this version remains current.
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
Status : PublishedPublication date : 2003-07
Edition : 1Number of pages : 5
Technical Committee:Secondary ion mass spectrometry
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