This standard was last reviewed and confirmed in 2016. Therefore this version remains current.
This International Standard specifies a format to supplement ISO 14976 to transfer data for the creation, expansion
and revision of a surface chemical analysis spectral database. The format is applied to Auger electron
spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) spectral data.
Status : PublishedPublication date : 2000-12
Edition : 1Number of pages : 17
Technical Committee:Data management and treatment
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