Standards catalogue

ISO/TC 201/SC 9

Scanning probe microscopy

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Standard and/or project under the direct responsibility of ISO/TC 201/SC 9 Secretariat Stage ICS
ISO 11039:2012
Surface chemical analysis -- Scanning-probe microscopy -- Measurement of drift rate
90.60
ISO 11775:2015
Surface chemical analysis -- Scanning-probe microscopy -- Determination of cantilever normal spring constants
60.60
ISO 11952:2014 [Withdrawn]
Surface chemical analysis -- Scanning-probe microscopy -- Determination of geometric quantities using SPM: Calibration of measuring systems
95.99
ISO 11952:2019
Surface chemical analysis -- Scanning-probe microscopy -- Determination of geometric quantities using SPM: Calibration of measuring systems
60.60
ISO 13083:2015
Surface chemical analysis -- Scanning probe microscopy -- Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
60.60
ISO 13095:2014
Surface Chemical Analysis -- Atomic force microscopy -- Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
90.20
ISO/DTR 13096 [Deleted]
Surface chemical analysis -- Scanning-probe microscopy -- Guidelines for the description of AFM probe properties
30.98
ISO/DIS 21222 [Under development]
Surface chemical analysis -- Scanning probe microscopy -- Procedure for the determination of elastic moduli for compliant materials using atomic force microscope and the two-point JKR method
40.60
ISO/AWI 23683 [Under development]
Surface chemical analysis -- scanning probe microscopy -- Guideline for experimental quantification of carrier concentration in semiconductor devices by using electric scanning probe microscopy
20.00
ISO 27911:2011
Surface chemical analysis -- Scanning-probe microscopy -- Definition and calibration of the lateral resolution of a near-field optical microscope
90.93

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