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Standard and/or project under the direct responsibility of ISO/TC 201/SC 9 Secretariat Stage ICS
ISO 11039:2012
Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate
90.60
ISO 11775:2015
Surface chemical analysis — Scanning-probe microscopy — Determination of cantilever normal spring constants
60.60
ISO 11952:2014
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
95.99
ISO 11952:2019
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
60.60
ISO 13083:2015
Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
60.60
ISO 13095:2014
Surface Chemical Analysis — Atomic force microscopy — Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
90.60
ISO/DTR 13096
Surface chemical analysis — Scanning-probe microscopy — Guidelines for the description of AFM probe properties
30.98
ISO/PRF 21222
Surface chemical analysis — Scanning probe microscopy — Procedure for the determination of elastic moduli for compliant materials using atomic force microscope and the two-point JKR method
50.20
ISO/CD 23683
Surface chemical analysis — scanning probe microscopy — Guideline for experimental quantification of carrier concentration in semiconductor devices by using electric scanning probe microscopy
30.20
ISO 27911:2011
Surface chemical analysis — Scanning-probe microscopy — Definition and calibration of the lateral resolution of a near-field optical microscope
90.93

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