| Subcommittee | Subcommittee Title | Published standards | Standards under development |
|---|---|---|---|
| ISO/TC 202/SC 1 | Terminology | 3 | 1 |
| ISO/TC 202/SC 2 | Electron probe microanalysis | 7 | 1 |
| ISO/TC 202/SC 3 | Analytical electron microscopy | 4 | 1 |
| ISO/TC 202/SC 4 | Scanning electron microscopy (SEM) | 2 | 2 |