Subcommittee Subcommittee Title Published standards Standards under development
ISO/TC 202/SC 1 Terminology 3 1
ISO/TC 202/SC 2 Electron probe microanalysis 7 1
ISO/TC 202/SC 3 Analytical electron microscopy 4 2
ISO/TC 202/SC 4 Scanning electron microscopy (SEM) 2 2

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Standard and/or project under the direct responsibility of ISO/TC 202 Secretariat Stage ICS
ISO 13067:2011
Microbeam analysis — Electron backscatter diffraction — Measurement of average grain size
90.92
ISO/DIS 13067
Microbeam analysis — Electron backscatter diffraction — Measurement of average grain size
40.20
ISO 15632:2002
Microbeam analysis — Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors
95.99
ISO 15632:2012
Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis
90.92
ISO/DIS 15632
Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microscope or an electron probe microanalyser (EPMA)
40.00
ISO 20720:2018
Microbeam analysis — Methods of specimen preparation for analysis of general powders using WDS and EDS
60.60
ISO 22029:2003
Standard file format for spectral data exchange
95.99
ISO 22029:2012
Microbeam analysis — EMSA/MAS standard file format for spectral-data exchange
90.92
ISO/DIS 22029
Microbeam analysis — EMSA/MAS standard file format for spectral-data exchange
40.00
ISO 22309:2006
Microbeam analysis — Quantitative analysis using energy-dispersive spectrometry (EDS)
95.99
ISO 22309:2011
Microbeam analysis — Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above
90.93
ISO/WD 23703
Guideline for Misorientation Analysis to assess mechanical damage by Electron Backscatter Diffraction (EBSD)
20.20
ISO/AWI 23749
Microbeam analysis - Electron backscatter diffraction Quantitative - Determination of austenite in steel
20.00
ISO 24173:2009
Microbeam analysis — Guidelines for orientation measurement using electron backscatter diffraction
90.93

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