| Subcommittee | Subcommittee Title | Published standards | Standards under development |
|---|---|---|---|
| ISO/TC 201/SC 1 | Terminology | 2 | 1 |
| ISO/TC 201/SC 2 | General procedures | 8 | 3 |
| ISO/TC 201/SC 3 | Data management and treatment | 4 | 1 |
| ISO/TC 201/SC 4 | Depth profiling | 5 | 1 |
| ISO/TC 201/SC 6 | Secondary ion mass spectrometry | 10 | 2 |
| ISO/TC 201/SC 7 | Electron spectroscopies | 22 | 3 |
| ISO/TC 201/SC 8 | Glow discharge spectroscopy | 5 | 2 |
| ISO/TC 201/SC 9 | Scanning probe microscopy | 6 | 4 |
| ISO/TC 201/SC 10 | X-ray Reflectometry (XRR) and X-ray Fluorescence (XRF) Analysis | 1 | 0 |
| Standard and/or project under the direct responsibility of ISO/TC 201 Secretariat | Stage | ICS |
|---|---|---|
|
ISO 14706:2000 [Withdrawn]
Surface chemical analysis -- Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
|
95.99 | |
|
Surface chemical analysis -- Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
|
60.60 | |
|
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry -- Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
|
90.92 | |
|
ISO/DIS 16413 [Under development]
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry -- Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
|
40.99 | |
|
Surface chemical analysis -- Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
|
90.60 | |
| 60.60 | ||
|
Surface chemical analysis -- Surface characterization -- Measurement of the lateral resolution of a confocal fluorescence microscope
|
60.60 | |
|
Surface chemical analysis -- Use of Total Reflection X-ray Fluorescence spectroscopy in biological and environmental analysis
|
90.60 | |
|
Surface chemical analysis -- Characterization of functional glass substrates for biosensing applications
|
60.60 |
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