ISO 14644-10:2022
p
ISO 14644-10:2022
76891
недоступно на русском языке
Текущий статус : Опубликовано
ru
Формат Язык
std 1 145 PDF + ePub
std 2 145 Бумажный
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Тезис

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.

NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.

NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

Общая информация

  •  : Опубликовано
     : 2022-05
    : Опубликование международного стандарта [60.60]
  •  : 2
  • ISO/TC 209
    13.040.35 
  • RSS обновления

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