Это стандарт пересмотрен ISO 14644-8:2013
Тезис
ISO 14644-8:2006 covers the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time weighted factors within the specification for classification.
ISO 14644-8:2006 currently considers only concentrations of AMC between 100 and 10?12 g/m3 under cleanroom operational conditions.
ISO 14644-8:2006 is not relevant for application in those industries, processes or production, where the presence of airborne molecular substances is not considered a risk to the product or process.
It is not the intention of ISO 14644-8:2006 to describe the nature of airborne molecular contaminants.
ISO 14644-8:2006 does not give a classification of surface molecular contamination.
Общая информация
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Текущий статус : WithdrawnДата публикации : 2006-08
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Версия : 1
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- ICS :
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Cleanrooms and associated controlled environments
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