Подкомитет Заголовок подкомитета Опубликованные стандарты Стандарты, находящиеся на стадии разработки
ISO/TC 201/SC 1 Terminology 2 1
ISO/TC 201/SC 2 General procedures 8 1
ISO/TC 201/SC 3 Data management and treatment 4 1
ISO/TC 201/SC 4 Depth profiling 5 2
ISO/TC 201/SC 6 Secondary ion mass spectrometry 11 3
ISO/TC 201/SC 7 Electron spectroscopies 22 3
ISO/TC 201/SC 8 Glow discharge spectroscopy 5 1
ISO/TC 201/SC 9 Scanning probe microscopy 7 2
ISO/TC 201/SC 10 X-ray Reflectometry (XRR) and X-ray Fluorescence (XRF) Analysis 1 0

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Стандарт и/или проект находящийся в компетенции ISO/TC 201 Секретариата Этап ICS
ISO 14706:2000
Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
95.99
ISO 14706:2014
Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
90.60
ISO 16413:2013
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
90.92
ISO/FDIS 16413
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
50.20
ISO 17331:2004
Surface chemical analysis — Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
90.93
ISO 17331:2004/Amd 1:2010
Surface chemical analysis — Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy — Amendment 1
60.60
ISO 18337:2015
Surface chemical analysis — Surface characterization — Measurement of the lateral resolution of a confocal fluorescence microscope
60.60
ISO/TS 18507:2015
Surface chemical analysis — Use of Total Reflection X-ray Fluorescence spectroscopy in biological and environmental analysis
90.93
ISO/TR 19693:2018
Surface chemical analysis — Characterization of functional glass substrates for biosensing applications
60.60
ISO/WD 24465
Protocol for data acquisition and determination of the minimum detectability of Surface Plasmon Resonance device
20.00

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